Fabrication and performance of 50 nm T-gates for InP high electron mobility transistors

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Bibliographic Details
Published in:Microelectronic engineering 2004-06, Vol.73-74, p.818-821
Main Authors: XIN CAO, THOMS, Stephen, MACINTYRE, Douglas, MCLELLAND, Helen, BOYD, Euan, ELGAID, Khaled, HILL, Richard, STANLEY, Colin R, THAYNE, Iain G
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(04)00227-8