Fabrication of slot antenna coupled warm carrier detectors for millimeter wave radiation

Slot antenna coupled thin film warm carrier devices were fabricated by an electron beam lithographic method associated with precisely controlled dry etching, and detection and mixing properties were investigated at 47 and 94GHz. The experimental results indicate that the fabricated slot antenna oper...

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Bibliographic Details
Published in:Microelectronic engineering 1998-03, Vol.41, p.445-448
Main Authors: Yasuoka, Yoshizumi, Shimizu, Takashi, Gamo, Kenji
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
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Description
Summary:Slot antenna coupled thin film warm carrier devices were fabricated by an electron beam lithographic method associated with precisely controlled dry etching, and detection and mixing properties were investigated at 47 and 94GHz. The experimental results indicate that the fabricated slot antenna operates as designed, and that the fabricated device operates as a detector and rectifies the millimeter wave signals induced on the antenna with a nonlinear I–V characteristic.
ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(98)00103-8