RBS study of the interdiffusion effect between CoFe/MnIr layers in tunnel junctions

Spin-dependent tunnel junctions (Si/Al 2O 3/Ta/NiFe/CoFe/Al 2O 3/CoFe/MnIr/Ta/TiWN) have been analysed with Rutherford backscattering spectrometry (RBS) using a 1.6 and 2.3 MeV He + beam at a grazing angle of incidence (from 70° to 82°). Results for the as-deposited samples and after anneal at 435°C...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2000-09, Vol.170 (1), p.205-210
Main Authors: Wei, P, Cardoso, S, de Jesus, C.M, Soares, J.C, Freitas, P.P, da Silva, M.F
Format: Article
Language:English
Subjects:
Interface diffusion
Magnetic moment
RBS
Tunnel junction
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Summary:Spin-dependent tunnel junctions (Si/Al 2O 3/Ta/NiFe/CoFe/Al 2O 3/CoFe/MnIr/Ta/TiWN) have been analysed with Rutherford backscattering spectrometry (RBS) using a 1.6 and 2.3 MeV He + beam at a grazing angle of incidence (from 70° to 82°). Results for the as-deposited samples and after anneal at 435°C are reported. The interface diffusion between MnIr and CoFe layers after annealing has been studied. A simpler structure (Si/Al 2O 3/MnIr/CoFe/Ta) was specially prepared to improve the resolution at specific interfaces. The interdiffusion between the MnIr and CoFe layers is correlated with a reduction of the magnetic moment in the annealed samples.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(00)00159-2