Intrinsic residual stresses in metal films synthesized by energetic particle deposition

Residual stresses are intrinsic to all physical vapor deposited coatings. Bombardment with energetic particles (ions or neutrals) has a strong influence on both the sign and the magnitude of intrinsic stresses. For example, stresses can change from large tensile to large compressive with increasing...

Full description

Saved in:
Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2001-04, Vol.175, p.688-693
Main Authors: Misra, A., Nastasi, M.
Format: Article
Language:English
Subjects:
Interatomic potentials
Ion-beam synthesis
Metal thin films
Residual stress
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Residual stresses are intrinsic to all physical vapor deposited coatings. Bombardment with energetic particles (ions or neutrals) has a strong influence on both the sign and the magnitude of intrinsic stresses. For example, stresses can change from large tensile to large compressive with increasing particle bombardment. We develop a model for the evolution of tensile residual stress with increasing bombardment based on the hypothesis that the tensile stresses originate due to the attractive interatomic forces between the coalescing crystallites. The model predictions are shown to compare favorably with experimental results.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(00)00537-1