Molecular dynamics and Monte-Carlo simulation of sputtering and mixing by ion irradiation

Molecular dynamics (MD) and Monte-Carlo (MC) simulations of low-energy (

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2001-06, Vol.180 (1), p.312-316
Main Authors: Aoki, T., Chiba, S., Matsuo, J., Yamada, I., Biersack, J.P.
Format: Article
Language:English
Subjects:
Ion mixing
Molecular dynamics simulation
Monte-Carlo simulation
SIMS resolution
Sputtering
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Summary:Molecular dynamics (MD) and Monte-Carlo (MC) simulations of low-energy (
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(01)00437-2