Micro-ERDA studies of hydrogen in polycrystalline CVD diamond windows

The incorporation of hydrogen in thick polycrystalline chemical vapour deposition diamond plates has been studied by elastic recoil detection with a 2.8 MeV He + microbeam. Hydrogen-rich inclusions of lateral dimensions 50–100 μm have been found and analysed quantitatively by depth resolved hydrogen...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2002-05, Vol.190 (1), p.324-328
Main Authors: Samlenski, R., Haug, Ch, Delto, R., Wild, Ch, Brenn, R.
Format: Article
Language:English
Subjects:
Hydrogen
Ion beam analysis
Nuclear microprobe
Polycrystalline CVD diamond
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Summary:The incorporation of hydrogen in thick polycrystalline chemical vapour deposition diamond plates has been studied by elastic recoil detection with a 2.8 MeV He + microbeam. Hydrogen-rich inclusions of lateral dimensions 50–100 μm have been found and analysed quantitatively by depth resolved hydrogen area maps and line scans. The laterally averaged hydrogen content and its depth profile were also characterized by the 1 H( 15 N, αγ) 12 C reaction. The observed hydrogen-rich inclusions correlate with features visible in optical microscopy but not with the optically visible crystallite topography.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(02)00454-8