Computer simulation of SiC and B4C sputtering by Ar+ and He+ ions bombardment

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-05, Vol.127-128, p.260-264
Main Authors: Pugacheva, T.S., Jurabekova, F.G., Miyagawa, Y., Valiev, S.Kh
Format: Article
Language:English
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ISSN:0168-583X
DOI:10.1016/S0168-583X(96)00936-6