Etching of amorphous Al2O3 produced by ion implantation

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-05, Vol.127-128, p.596-598
Main Authors: McHargue, Carl J., Hunn, John D., Joslin, Debra L., Alves, E., da Silva, M.F., Soares, J.C.
Format: Article
Language:English
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ISSN:0168-583X
DOI:10.1016/S0168-583X(96)01139-1