Study of localised radiation damage to PIPS detectors by a scanning ion microprobe: Measured effects and the consequences for STIM analysis

Radiation damage effects in a PIPS particle detector have been studied by direct irradiation with a 4 MeV He + focused ion beam, using the Eindhoven scanning ion microprobe set-up. This set-up enables extreme sensitivity and accuracy in pulse-height measurement. Pulse-height dependence on ion dose a...

Full description

Saved in:
Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-07, Vol.130 (1), p.160-165
Main Authors: Simons, D.P.L., Maas, A.J.H., Mutsaers, P.H.A., de Voigt, M.J.A.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Radiation damage effects in a PIPS particle detector have been studied by direct irradiation with a 4 MeV He + focused ion beam, using the Eindhoven scanning ion microprobe set-up. This set-up enables extreme sensitivity and accuracy in pulse-height measurement. Pulse-height dependence on ion dose and the lateral variations of pulse-height response after damaging were studied, for different bias voltages. Pulse height was found to decrease linearly with ion dose and this could be observed after only a few ions per scan position, corresponding to a dose of 10 8/cm 2. Pulse-height loss was found to be restricted to damaged detector areas. Consequences of this pulse-height dependence on ion dose and scan position for the accuracy of STIM analyses are discussed.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(97)00166-3