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A beam rocking system for the Oxford nuclear microprobe: A new approach to channeling analysis

This paper describes the design and implementation of a beam rocking system for the Oxford nuclear microprobe. This system varies the angle of incidence of a focused MeV ion beam on a sample using two set of dipole scan coils of equal and opposite fields, allowing the sample to remain fixed while th...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-09, Vol.129 (4), p.534-542
Main Authors: de Kerckhove, D.G., Breese, M.B.H., Grime, G.W.
Format: Article
Language:English
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Summary:This paper describes the design and implementation of a beam rocking system for the Oxford nuclear microprobe. This system varies the angle of incidence of a focused MeV ion beam on a sample using two set of dipole scan coils of equal and opposite fields, allowing the sample to remain fixed while the beam is rocked in angle about a small area. This method of producing angle-resolved channeling images and scans does not require any modifications to existing data-acquisition software nor the use of a high-precision motorized goniometer. Beam optics calculation results are presented for a beam rocking system using three different standard microprobe focusing systems. The maximum angular range of this system is 3.15°. Channeling images and measurements of angular rotation in a strained Si 0.90Ge 0.10 Si crystal are presented using this technique.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(97)00315-7