Beam-power heating effect on the synthesis of graded composition epitaxial Si1−xGex alloy layers

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-08, Vol.129 (3), p.377-386
Main Authors: Curello, G., Gwilliam, R., Harry, M., Jackson, S., Sealy, B.J.
Format: Article
Language:English
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ISSN:0168-583X
DOI:10.1016/S0168-583X(97)00326-1