A study of channeling patterns from strained [formula omitted] bilayers close to 〈011〉 axes

This paper characterises the angular intensity distribution of MeV protons transmitted through strained Si 1−x Ge x Si bilayers close to the [0 1 1] axis. The ring-like intensity distribution produced by the front layer [0 1 1] axis when it is aligned close to the beam direction is projected either...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-09, Vol.129 (4), p.511-518
Main Authors: Breese, M.B.H., Smulders, P.J.M.
Format: Article
Language:English
Subjects:
Channeling patterns
Nuclear microprobe
Strained layers
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Summary:This paper characterises the angular intensity distribution of MeV protons transmitted through strained Si 1−x Ge x Si bilayers close to the [0 1 1] axis. The ring-like intensity distribution produced by the front layer [0 1 1] axis when it is aligned close to the beam direction is projected either towards or away from the rotated back layer [0 1 1] axis. The resultant transmitted angular intensity distribution depends on both the bilayer tilt angle and the interface rotation angle. Previously unobserved intensity distributions through such structures are simulated using a Monte Carlo channeling code, and similar behaviour is also observed in channeling patterns recorded from thinned, strained Si 1−x Ge x Si bilayers.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(97)00360-1