Simulation of low-energy ion scattering

A new simulation program ‘MATCH’ has been developed for a detailed analysis of low-energy ion scattering (LEIS) and recoiling data. Instead of performing the full calculation of the three-dimensional trajectories through the sample from the ion source towards the detector, incoming trajectories as w...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1997-12, Vol.132 (4), p.578-584
Main Authors: Langelaar, M.H., Breeman, M., Mijiritskii, A.V., Boerma, D.O.
Format: Article
Language:English
Subjects:
Low-energy ion scattering
Simulation
Surface structure
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Summary:A new simulation program ‘MATCH’ has been developed for a detailed analysis of low-energy ion scattering (LEIS) and recoiling data. Instead of performing the full calculation of the three-dimensional trajectories through the sample from the ion source towards the detector, incoming trajectories as well as reversed-time outgoing trajectories are calculated, separately. Finally, these trajectories are matched to obtain the yield. The program has been tested for spectra and azimuthal scans of scattering and recoiling events of various sample species in different scattering geometries.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(97)00503-X