Ion implantation in TiO2: Effect of the charge state on the lattice site occupation

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1998-03, Vol.136-138, p.436-441
Main Authors: Meyer, O., Khubeis, I., Fromknecht, R., Massing, S.
Format: Article
Language:English
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ISSN:0168-583X
DOI:10.1016/S0168-583X(97)00866-5