Gold, silver and copper nanocrystal formation in SiC by MeV implantation

Nanoclusters gold, silver and copper are produced in 6H-SiC by implanting 1.0 MeV Au, 2.0 MeV Ag and 2.0 MeV Cu into the Si face of SiC at room or elevated temperature followed by annealing at various temperatures. The absorption bands for each type of metal nanoclusters in SiC were determined using...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2000-05, Vol.166-167, p.892-896
Main Authors: Zimmerman, R.L., Ila, D., Williams, E.K., Gasic, B., Elsamadicy, A., Evelyn, A.L., Poker, D.B., Hensley, D.K., Larkin, David J.
Format: Article
Language:English
Subjects:
Implantation
Nanocrystals
Nonlinear optical materials
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Summary:Nanoclusters gold, silver and copper are produced in 6H-SiC by implanting 1.0 MeV Au, 2.0 MeV Ag and 2.0 MeV Cu into the Si face of SiC at room or elevated temperature followed by annealing at various temperatures. The absorption bands for each type of metal nanoclusters in SiC were determined using optical absorption spectrophotometry. Elevated temperature implantation reduces optical absorption due to ion implantation induced defects. Using the Mie theory, we determined the index of refraction in the implanted volume.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(99)01040-X