PMMA-based resists for a spectral range near 13nm

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2000-06, Vol.448 (1-2), p.487-492
Main Authors: Bulgakova, S.A, Lopatin, A.Ya, Luchin, V.I, Mazanova, L.M, Molodnjakov, S.A, Salashchenko, N.N
Format: Article
Language:English
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ISSN:0168-9002
DOI:10.1016/S0168-9002(00)00237-0