The production of CxHx−1 film using low pressure plasma CVD

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2002-03, Vol.480 (1), p.84-91
Main Authors: Weidong, Wu, Jiangshan, Luo, Yong, Huang, Dangzhong, Gao, Zhanwen, Zhang, Chunpei, Zhao
Format: Article
Language:English
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ISSN:0168-9002
DOI:10.1016/S0168-9002(01)02073-3