Analysis of nanoscale multilayers by EDXS and EELS in the STEM

After a short description of a model for calculation of element specific linescan intensity profiles measured in an analytical transmission electron microscope on cross-sections of nanoscale multilayers by EDXS and EELS in the STEM mode the essential influences to the results are discussed. Particul...

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Bibliographic Details
Published in:Applied surface science 2001-07, Vol.179 (1), p.61-67
Main Authors: Thomas, Jürgen, Fliervoet, Timon, Wetzig, Klaus
Format: Article
Language:English
Subjects:
Analytical chemistry
Analytical TEM
Chemistry
EDXS
EELS
Electron spectroscopy (x-ray photoelectron (XPS), Auger electron spectroscopy(AES), etc.)
Exact sciences and technology
Nanoscale multilayers
Spectrometric and optical methods
STEM
X-ray, Mossbauer, and other γ-ray spectroscopic analysis methods
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Summary:After a short description of a model for calculation of element specific linescan intensity profiles measured in an analytical transmission electron microscope on cross-sections of nanoscale multilayers by EDXS and EELS in the STEM mode the essential influences to the results are discussed. Particularly, the signal-to-noise ratio is considered. To confirm the model measured and calculated profiles are compared. Investigations on nanoscale multilayers require a field emission gun and a specimen stage with high stability. Specimen drift can lead to completely confused intensity profiles and has to be avoided or corrected during the measurement.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(01)00264-1