CNTs grown on the surface of various materials by large volume MP-CVD for VME applications

The carbon nanotubes (CNTs) were grown successfully on the surface of various substrates by microwave plasma chemical vapor deposition (MP-CVD). The substrates investigated included insulator substrates (glass, ceramic, and sapphire), semiconductor substrates (Si), metal thin film substrates (Cr, Ni...

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Bibliographic Details
Published in:Applied surface science 2003-06, Vol.215 (1), p.209-213
Main Authors: Liu, G.Y., Zhong, D.Y., Xia, S.H., Cheng, S.F., Ding, Y.G., Lu, Y.J., Shao, Y.J., Li, H.Y., Hangfu, L.J., Wang, E.G.
Format: Article
Language:English
Subjects:
Carbon nanotubes (CNT)
Catalytic growth
Emitter
Field emission
Microwave plasma chemical vapor deposition (MP-CVD)
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Summary:The carbon nanotubes (CNTs) were grown successfully on the surface of various substrates by microwave plasma chemical vapor deposition (MP-CVD). The substrates investigated included insulator substrates (glass, ceramic, and sapphire), semiconductor substrates (Si), metal thin film substrates (Cr, Ni, etc.), and the metal surface of stainless steel plates. We found that the first three kinds of substrates needed to be coated with Fe catalytic particles, but the metal surface of stainless steel plates was able to be in “no catalyst” condition. Main technologies, results and initial application of field emission are given.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(03)00284-8