Enhancement of field emission from cathodes with superthin diamond-like carbon films

In this work, the fact of rather stable enhanced field emission from Si-tip covered by diamond-like carbon (DLC) films is demonstrated. Effect of different types of coatings and surface treatments (electrochemical etching, H +-implantation, Cs-enriched layers and DLC films) on the electron field emi...

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Bibliographic Details
Published in:Applied surface science 1997-02, Vol.111, p.213-217
Main Authors: Litovchenko, V.G., Evtukh, A.A., Marchenko, R.I., Klyui, N.I., Semenovich, V.A.
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Diamond-like carbon film
Electron and ion emission by liquids and solids
impact phenomena
Electronics
Exact sciences and technology
Field emission
Field emission, ionization, evaporation, and desorption
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Vacuum microelectronics
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Summary:In this work, the fact of rather stable enhanced field emission from Si-tip covered by diamond-like carbon (DLC) films is demonstrated. Effect of different types of coatings and surface treatments (electrochemical etching, H +-implantation, Cs-enriched layers and DLC films) on the electron field emission (FE) from silicon tips have been examined. The emission characteristics of FE such as the emission area of tip α, factor of electric field enhancement β, coefficient of quality of field emitter γ, work function, etc. have been calculated. The most remarkable enhancement of FE have been observed for Si-cathodes covered by DLC films. The mechanism of the effect observed is discussed.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(96)00727-1