Nitridation of Al2O3 and GaAs surfaces by control enhanced ECR plasma

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Bibliographic Details
Published in:Applied surface science 1997-04, Vol.113-114, p.622-626
Main Authors: Mutoh, H., O'Keeffe, P., Den, S., Komuro, S., Morikawa, T., Park, Y.J., Hara, K., Munekata, H., Kukimoto, H.
Format: Article
Language:English
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ISSN:0169-4332
DOI:10.1016/S0169-4332(96)00828-8