Modelling of pyrolytic laser-induced deposition

The growth of deposits in pyrolytic laser-induced chemical vapor deposition is modelled using a finite-element technique. Numerical results are compared with experimental observations in various systems. Different peculiarities of growth can be explained.

Saved in:
Bibliographic Details
Published in:Applied surface science 1997-02, Vol.109-110, p.453-456, Article 453
Main Author: Piglmayer, K
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The growth of deposits in pyrolytic laser-induced chemical vapor deposition is modelled using a finite-element technique. Numerical results are compared with experimental observations in various systems. Different peculiarities of growth can be explained.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(96)00920-8