Formation of polycrystalline silicon with log-normal grain size distribution

Polycrystalline silicon films, prepared by annealing from amorphous precursors, are analyzed by transmission electron microscopy and reveal a logarithmic-normal distribution of grain sizes. Such size distributions also result from various other crystallization processes from non-crystalline phases....

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Bibliographic Details
Published in:Applied surface science 1998-01, Vol.123-124, p.376-380
Main Authors: Bergmann, Ralf B., Shi, Frank G., Queisser, Hans J., Krinke, Jörg
Format: Article
Language:English
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Summary:Polycrystalline silicon films, prepared by annealing from amorphous precursors, are analyzed by transmission electron microscopy and reveal a logarithmic-normal distribution of grain sizes. Such size distributions also result from various other crystallization processes from non-crystalline phases. The cessation of nucleation due to the finite amorphous reservoir leads to these logarithmic-normal size distributions. The origin of these observed distributions is a result of nucleation and growth, rather than coarsening of crystallites.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(97)00494-7