Laser cleaning of ablation debris from CO2-laser-etched vias in polyimide

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Bibliographic Details
Published in:Applied surface science 1998-05, Vol.127-129, p.731-737
Main Authors: Coupland, Kristen, R. Herman, Peter, Gu, Bo
Format: Article
Language:English
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ISSN:0169-4332
DOI:10.1016/S0169-4332(97)00733-2