Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation

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Bibliographic Details
Published in:Applied surface science 1999-01, Vol.138-139, p.107-110
Main Authors: Beinhorn, F, Ihlemann, J, Simon, P, Marowsky, G, Maisenhölder, B, Edlinger, J, Neuschäfer, D, Anselmetti, D
Format: Article
Language:English
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ISSN:0169-4332
DOI:10.1016/S0169-4332(98)00390-0