Study of thermal diffusion between Al2O3 and Al thin films

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Bibliographic Details
Published in:Applied surface science 1999-09, Vol.151 (1-2), p.139-147
Main Authors: GARCIA-MENDEZ, M, VALLES-VILLARREAL, N, HIRATA-FLORES, G. A, FARIAS, M. H
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Diffusion
interface formation
Exact sciences and technology
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Physics
Solid surfaces and solid-solid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(99)00133-6