Plasma deposition of La0.8Sr0.2MnO3 thin films on yttria-stabilized zirconia from aerosol precursor

For the first time, thin films of perovskite-type La0.8Sr0.2MnO3 (LSM) were deposited on yttria-stabilized zirconia (YSZ) substrates by microwave plasma coating technique, using an aerosol precursor generated by ultrasonic excitation. Precursor was a mixed aqueous solution containing the correspondi...

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Bibliographic Details
Published in:Materials chemistry and physics 2001-12, Vol.72 (3), p.297-300
Main Authors: Wang, H.B., Gao, J.F., Peng, D.K., Meng, G.Y.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
LSM
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Plasma deposition
SOFCs
Thin films
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Summary:For the first time, thin films of perovskite-type La0.8Sr0.2MnO3 (LSM) were deposited on yttria-stabilized zirconia (YSZ) substrates by microwave plasma coating technique, using an aerosol precursor generated by ultrasonic excitation. Precursor was a mixed aqueous solution containing the corresponding nitrates and glycine which could promote the thermal decomposition of nitrates. The deposited film had a single-phase perovskite microstructure with a thickness of 4–5μm. The metal element ratio of the as-deposited film was close to that of the solution. Studies showed that glycine played a vital role for obtaining the single perovskite phase La0.8Sr0.2MnO3 film.
ISSN:0254-0584
1879-3312
DOI:10.1016/S0254-0584(01)00331-5