Surface-discharge characteristics of magnesium oxide thin films prepared by ion beam-assisted deposition

To improve the lifetime of AC plasma display panels (PDPs), the surface glow discharge characteristics of MgO films prepared by ion beam-assisted deposition have been investigated. With MgO films prepared by evaporation of MgO and simultaneous argon ion bombardment with energy of approximately 300 e...

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Bibliographic Details
Published in:Surface & coatings technology 2003, Vol.162 (1), p.11-18
Main Authors: Yu, Zhi-Nong, Seo, Jong-Wook, Yu, Soon-Jae, Zheng, De-Xiu, Sun, Jian
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Ion beam-assisted deposition
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
MgO films
Physics
Plasma display panel
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Summary:To improve the lifetime of AC plasma display panels (PDPs), the surface glow discharge characteristics of MgO films prepared by ion beam-assisted deposition have been investigated. With MgO films prepared by evaporation of MgO and simultaneous argon ion bombardment with energy of approximately 300 eV and oxygen introduction at a partial pressure of approximately 0.2 mTorr, the discharge voltage values are comparable with those of e-beam evaporated MgO films. Moreover, the sample prepared shows more sputter-resistant properties than samples prepared by the electron-beam method. It is believed that the ion beam-assisted method is appropriate to deposit MgO film for a protective layer for AC PDPs.
ISSN:0257-8972
1879-3347
DOI:10.1016/S0257-8972(02)00580-7