Studies of physical vapour deposition interfaces generated by Ti ions in a steered arc discharge

The deposition of ceramic coatings of the type TiC/N on steels enhances the surface properties of the coated substrate. A critical stage in the Arc Bond Sputtering TM process, using the combined steered arc and unbalanced magnetron, is the titanium ion etch which improves the adhesion of the TiN coa...

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Bibliographic Details
Published in:Surface & coatings technology 1997-12, Vol.97 (1), p.713-718
Main Authors: Davidson, J.L, Brooks, J.S, Forder, S.D, Münz, W.-D
Format: Article
Language:English
Subjects:
CEMS
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Interfaces
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
PDV
Physics
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Summary:The deposition of ceramic coatings of the type TiC/N on steels enhances the surface properties of the coated substrate. A critical stage in the Arc Bond Sputtering TM process, using the combined steered arc and unbalanced magnetron, is the titanium ion etch which improves the adhesion of the TiN coating to the substrate. Conversion electron Mössbauer spectroscopy (CEMS) has provided evidence that the ion etch pretreatment involves the formation of phases including FeTi at a narrow interface region. To detect these phases it has been necessary to enrich substrates with the Mössbauer isotope 57Fe. The enriched 57Fe substrates have been treated by a range of ion etch processes and then characterized by CEMS. The role of the FeTi in improving coating–substrate adhesion is not fully understood but work is currently underway using XTEM, SNMS, Auger electron spectroscopy, etc., with CEMS to gain an understanding of the mechanisms involved.
ISSN:0257-8972
1879-3347
DOI:10.1016/S0257-8972(97)00337-X