Loading…

Synthesis and characterization of thin films of WCx produced by mixing W and C plasma streams

Saved in:

Bibliographic Details
Published in:	Surface & coatings technology 1997-10, Vol.94-95 (1-3), p.220-225
Main Authors:	MONTEIRO, O. R, DELPLANCKE-OGLETREE, M.-P, YU LO, R, WINAND, R, BROWN, I
Format:	Article
Language:	English
Subjects:	Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Physics Vacuum deposition
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!