Carbon ion charge states and energy distributions for DLC ablation plumes from 100-fs 780 nm laser pulses

A time-of-flight, sector-field, electrostatic analyzer has been used to obtain detailed information about the ionic charge states of carbon and their associated energy distributions for laser ablation plumes typical of those used for depositing diamond-like carbon (DLC) films. It is observed that fo...

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Bibliographic Details
Published in:Surface & coatings technology 1998-03, Vol.100, p.496-499
Main Authors: VanRompay, P.A., Nantel, M., Pronko, P.P.
Format: Article
Language:English
Subjects:
Ion accelerator
Ion distributions
Laser contrast
Laser-plasma interaction
Ultrafast laser
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Summary:A time-of-flight, sector-field, electrostatic analyzer has been used to obtain detailed information about the ionic charge states of carbon and their associated energy distributions for laser ablation plumes typical of those used for depositing diamond-like carbon (DLC) films. It is observed that for 100 fs laser pulses in the 10 14 to 10 16W/cm 2 intensity range, the characteristics of these distributions are highly dependent on the peak-to-background contrast ratio of the laser pulse. Ion energies are observed and examined in the kinetic energy range from 100 eV to 20 keV. Energy distributions are compared with numerical results for hydrodynamic expansion and for effects of plasma ambipolar layers.
ISSN:0257-8972
1879-3347
DOI:10.1016/S0257-8972(97)00678-6