Laser writing on gold-containing hydrocarbon matrix films deposited by a technique combining cathodic sputtering with hydrocarbon plasma polymerization

Conducting metal tracings have been realized on gold-containing hydrocarbon matrix films deposited on glass and silicon substrates by a technique combining cathodic sputtering with radio-frequency glow discharge. The metal tracings were formed as a consequence of laser irradiation of the films, whic...

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Bibliographic Details
Published in:Surface & coatings technology 1999-09, Vol.116-119, p.638-642
Main Authors: Guyard, C., Despax, B.
Format: Article
Language:English
Subjects:
Adhesion
Composite
Laser direct writing
Plasma deposition
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Summary:Conducting metal tracings have been realized on gold-containing hydrocarbon matrix films deposited on glass and silicon substrates by a technique combining cathodic sputtering with radio-frequency glow discharge. The metal tracings were formed as a consequence of laser irradiation of the films, which permitted the generation of localized heating which decomposed the hydrocarbon matrix and agglomerated the gold particles leaving conducting patterns. We studied the influence of some interfaces (nickel–chromium and titanium) in order to improve the adhesion and mechanical resistance of the gold line. The acquired gold features were mainly characterized by ‘scotch and scratch test’ and scanning electronic microscopy (SEM).
ISSN:0257-8972
1879-3347
DOI:10.1016/S0257-8972(99)00075-4