Discharge diagnosis and controlled deposition of SnOx:F films by DC-reactive sputtering from a metallic tin target

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Bibliographic Details
Published in:Surface & coatings technology 1999-12, Vol.122 (2-3), p.136-142
Main Authors: Martel, A., Caballero-Briones, F., Fandiño, J., Castro-Rodrı́guez, R., Bartolo-Pérez, P., Zapata-Navarro, A., Zapata-Torres, M., Peña, J.L.
Format: Article
Language:English
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ISSN:0257-8972
DOI:10.1016/S0257-8972(99)00290-X