Magnetic properties and structure of Nd-Fe-B thin films with Cr and Ti underlayers

We investigated the influence of the underlayers of Cr and Ti on the structure and magnetic properties of Nd-Fe-B thin films which were produced by a conventional RF sputtering method. The thickness of the underlayer and the substrate temperature were varied from 0 to 5000 Å and from room temperatur...

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Bibliographic Details
Published in:Journal of magnetism and magnetic materials 1998, Vol.177, p.911-912
Main Authors: Shima, T., Kamegawa, A., Aoyagi, E., Hayasaka, Y., Fujimori, H.
Format: Article
Language:English
Subjects:
Hard magnetic material
High coercivity
Nd-Fe-B thin film
Sputtering
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Summary:We investigated the influence of the underlayers of Cr and Ti on the structure and magnetic properties of Nd-Fe-B thin films which were produced by a conventional RF sputtering method. The thickness of the underlayer and the substrate temperature were varied from 0 to 5000 Å and from room temperature to 670°C, respectively. It was found that the type and the thickness of the underlayer materials and the substrate temperature strongly influenced the crystal orientation and magnetic properties. The main crystalline phase was a Nd 2Fe 14B compound, whose tetragonal c-axis was aligned perpendicularly to the film plane. A high coercive force ( H c = 3.7 kOe) was achieved in the following conditions; Cr underlayer with the thickness of 500 Å and the substrate temperature of 650°C.
ISSN:0304-8853
DOI:10.1016/S0304-8853(97)00567-2