Monitoring chemical vapour deposition of pyrocarbon by electron spin resonance

Pyrolytic carbon films were deposited on boron nitride substrates during plug-flow of a methane/argon gas mixture through a hot-wall tubular reactor at 100 kPa and 1100°C. Of particular interest is the time resolved development of chemical reactions within the free reactor volume, which is projected...

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Bibliographic Details
Published in:Synthetic metals 2000-09, Vol.114 (3), p.325-329
Main Authors: Buschhaus, C, Dormann, E, Hüttinger, K.J
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Chemical vapour deposition
Cross-disciplinary physics: materials science
rheology
Electron spin resonance
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Pyrocarbon
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Summary:Pyrolytic carbon films were deposited on boron nitride substrates during plug-flow of a methane/argon gas mixture through a hot-wall tubular reactor at 100 kPa and 1100°C. Of particular interest is the time resolved development of chemical reactions within the free reactor volume, which is projected to the formed structures along the reactor axis. Spatially resolved electron spin resonance (ESR) is used to characterize the deposited films. The width and asymmetry of the ESR line varies monotonously along the reactor axis by more than one order of magnitude within 25 mm.
ISSN:0379-6779
1879-3290
DOI:10.1016/S0379-6779(00)00262-9