Comparison between a radio-frequency and direct current glow discharge in argon by a hybrid Monte Carlo–fluid model for electrons, argon ions and fast argon atoms

A hybrid Monte Carlo–fluid model has been developed for the electrons, argon ions and fast argon atoms in an argon glow discharge, either operated in the dc mode or the capacitively coupled rf mode. Typical working conditions for rf GD-OES are considered, i.e. approximately 6 torr argon gas pressure...

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Bibliographic Details
Published in:Spectrochimica acta. Part B: Atomic spectroscopy 1999-09, Vol.54 (9), p.1335-1350
Main Authors: Bogaerts, Annemie, Gijbels, Renaat, Goedheer, Wim
Format: Article
Language:English
Subjects:
Argon
Exact sciences and technology
Fluid model
Glow discharge
Hybrid model
Modeling
Monte carlo methods
Monte Carlo model
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma
Plasma simulation
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Summary:A hybrid Monte Carlo–fluid model has been developed for the electrons, argon ions and fast argon atoms in an argon glow discharge, either operated in the dc mode or the capacitively coupled rf mode. Typical working conditions for rf GD-OES are considered, i.e. approximately 6 torr argon gas pressure and approximately 10 W power. Typical results of the model, like the potential distributions, densities, fluxes and ionization rates, will be presented and compared between the two operation modes. It will be demonstrated that the rf discharge yields more efficient ionization than the dc discharge, and hence the rf discharge requires lower voltages to obtain the same amount of power, which is in good correspondence to experimental observations.
ISSN:0584-8547
1873-3565
DOI:10.1016/S0584-8547(99)00080-4