SAW diagnostics of GaAs surface structure

Surface acoustic waves (SAW) are very sensitive to the properties of crystal surfaces, so they find an application in crystal surface diagnostics. In this work GaAs (1 1 1) semi-insulating samples had SAW transducers formed as Al thin-film interdigital structures that operated at a central frequency...

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Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 1999-03, Vol.263, p.84-86
Main Authors: Briantseva, T.A, Bullough, T.J, Lioubtchenko, D.V, Markov, I.A, Tolmachev, E.M
Format: Article
Language:English
Subjects:
Diagnostics
GaAs surface
SAW propagation
Thin films
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Summary:Surface acoustic waves (SAW) are very sensitive to the properties of crystal surfaces, so they find an application in crystal surface diagnostics. In this work GaAs (1 1 1) semi-insulating samples had SAW transducers formed as Al thin-film interdigital structures that operated at a central frequency of 65 MHz. SAW parameters (amplitude and phase variations of the SAW output signals) were measured during irradiation of the GaAs surface from a light source. The results indicate that SAW propagation is sensitive not only to the state of the natural oxide layers covering the GaAs surface, including oxide composition, surface morphology etc., but also to the crystalline state of the GaAs surface itself, particularly to the presence of stress deformations within the GaAs. These deformations are most likely due to a modification of the oxide layer that changes the SAW maximum velocity direction, as indicated by changes in the SAW phase velocity.
ISSN:0921-4526
1873-2135
DOI:10.1016/S0921-4526(98)01199-5