Mechanical properties of suspended structures at radio frequencies

We report on our work on nanomechanical resonators. The resonators are machined out of commercial silicon-on-insulator (SOI) material with a covering metal layer having eigenfrequencies in the radio frequency (RF) regime. At higher oscillating amplitudes they are driven into nonlinear response. The...

Full description

Saved in:
Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 2000-05, Vol.280 (1), p.553-554
Main Authors: Erbe, A, Krömmer, H, Kraus, A, Blick, R.H
Format: Article
Language:English
Subjects:
Electromechanical resonance
Micromechanical devices
Vibrations
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We report on our work on nanomechanical resonators. The resonators are machined out of commercial silicon-on-insulator (SOI) material with a covering metal layer having eigenfrequencies in the radio frequency (RF) regime. At higher oscillating amplitudes they are driven into nonlinear response. The properties of the nonlinear resonators can be used for charge detection. Furthermore, we report on first experiments on using these resonators for exciting phonon and roton modes in 4He.
ISSN:0921-4526
1873-2135
DOI:10.1016/S0921-4526(99)01861-X