Correlation between the chemical bonding and the physical properties of the CNx films obtained by pulsed laser deposition from C targets in low-pressure N2

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2003-02, Vol.97 (3), p.251-257
Main Authors: György, E, Mihailescu, I.N, Baleva, M, Abrashev, M, Trifonova, E.P, Szekeres, A, Perrone, A
Format: Article
Language:English
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ISSN:0921-5107
DOI:10.1016/S0921-5107(02)00591-3