Processing and ultraviolet patterning of LiNbO3 epitaxial films from metallorganic precursors

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 1996-10, Vol.41 (1), p.117-122
Main Authors: Hirano, Shin-ichi, Yogo, Toshinobu, Kikuta, Ko-ichi, Sakamoto, Wataru, Takeichi, Yoshikuni
Format: Article
Language:English
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ISSN:0921-5107
DOI:10.1016/S0921-5107(96)01636-4