Optimisation of experimental conditions for variable angle spectroscopic ellipsometry analysis. Application to GaAs/(Al,Ga)As quantum well characterisation

For variable angle spectroscopic ellipsometry (VASE), a systematic research of the best set of angles of incidence taking into account sensitivities of the spectra to the thickness and dielectric function as well as correlation can significantly improve the accuracy of studies. A procedure minimisin...

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 1999-12, Vol.66 (1), p.88-91
Main Authors: Colard, Stéphane, Mihailovic, Martine
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Iii-v semiconductors
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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Summary:For variable angle spectroscopic ellipsometry (VASE), a systematic research of the best set of angles of incidence taking into account sensitivities of the spectra to the thickness and dielectric function as well as correlation can significantly improve the accuracy of studies. A procedure minimising the expected uncertainties of the parameters is developed. A GaAs/(Al,Ga)As quantum well structure has been investigated using the above experimental procedure. Deduced composition and thickness from VASE and photoluminescence experiments are in good agreement with reflectivity results.
ISSN:0921-5107
1873-4944
DOI:10.1016/S0921-5107(99)00135-X