Developments in laser micro-machining techniques

Two techniques are described which further extend the scope of laser micro-processing systems used in industrial applications. One technique, synchronised overlay scanning, uses a mask projection concept and is used with excimer lasers to micro-machine multi-dimensional structures into materials. Th...

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Bibliographic Details
Published in:Journal of materials processing technology 2002-09, Vol.127 (2), p.206-210
Main Authors: Rizvi, Nadeem H, Apte, Paul
Format: Article
Language:English
Subjects:
Beam scanning
Laser applications
Laser micro-machining
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Summary:Two techniques are described which further extend the scope of laser micro-processing systems used in industrial applications. One technique, synchronised overlay scanning, uses a mask projection concept and is used with excimer lasers to micro-machine multi-dimensional structures into materials. The other technique, sync scan, is used with galvanometer-based scanner systems and provides an attractive alternative to a mask projection approach in many applications. Both techniques are reviewed in detail and manufacturing applications where they are applicable are introduced.
ISSN:0924-0136
DOI:10.1016/S0924-0136(02)00143-7