Two-dimensional thermally actuated optical microprojector

A dual-axis, raster-scanning laser display based on a monolithic micromachined scanner is presented. The scanner consists of a mirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that the two orthogonal angular motions are given by the same “L”-shaped cantile...

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 2000-08, Vol.85 (1), p.424-429
Main Authors: Schweizer, S, Cousseau, P, Lammel, G, Calmes, S, Renaud, Ph
Format: Article
Language:English
Subjects:
Bimorph actuator
Circuits and circuit components
Circuits ans circuit components
Display
Electrical and electronic components, instruments and techniques
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Microprojector
Optical instruments, equipment and techniques
Optical scanning
Physics
Silicon micromachining
Transducers
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Summary:A dual-axis, raster-scanning laser display based on a monolithic micromachined scanner is presented. The scanner consists of a mirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that the two orthogonal angular motions are given by the same “L”-shaped cantilever, which is simultaneously excited at non-resonance (frame scanning) and at resonance (raster scanning). The demonstration microdevice has a raster-scanning frequency at 1345 Hz that allows, if combined with 10 Hz sawtooth frame signal, the definition of more than 100 lines. Mechanical scan amplitudes over 15° in two orthogonal directions were achieved. The typical power consumption is 5 mW.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(00)00384-8