The silicon angular rate sensor system DAVED

The angular rate sensor system DAVED® ( Decoupled Angular Velocity Detector) is presented, which consists of a vacuum packaged sensor–die and a discrete readout electronics delivering an analog output signal. The noise equivalent rate in a 50 Hz bandwidth corresponds to 0.1 deg/s. The resolution is...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2000-09, Vol.84 (3), p.280-284
Main Authors: Geiger, Wolfram, Merz, Jürgen, Fischer, Thomas, Folkmer, Bernd, Sandmaier, Hermann, Lang, Walter
Format: Article
Language:English
Subjects:
Angular rate
Angular rate sensor
Angular velocity
Exact sciences and technology
General equipment and techniques
Gyroscope
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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Summary:The angular rate sensor system DAVED® ( Decoupled Angular Velocity Detector) is presented, which consists of a vacuum packaged sensor–die and a discrete readout electronics delivering an analog output signal. The noise equivalent rate in a 50 Hz bandwidth corresponds to 0.1 deg/s. The resolution is 0.008 deg/s and the bias stability over the temperature range of −20°C to 70°C is less than ±1.1 deg/s. The drift can be significantly reduced by an improved readout electronics.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(00)00392-7