Low-noise charge sensitive readout for pyroelectric sensor arrays using PVDF thin film

• Published in: Sensors and actuators. A, Physical Physical, 2000-08, Vol.85 (1), p.267-274
• Main Authors: Weller, H.J, Setiadi, D, Binnie, T.D
• Format: Article
• Language: English
• Subjects: Bolometer; infrared, submillimeter wave, microwave and radiowave receivers and detectors; Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors; CMOS; Exact sciences and technology; Focal plane array; General equipment and techniques; Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Low noise; Physics; PVDF; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(00)00411-8

The paper presents a fully integrated low-noise readout circuit for the purpose of front-end amplification in pyroelectric infrared focal plane arrays (IRFPA). A low-noise and low-power charge sensitive amplifier (CSA) has been fabricated and characterised in a standard CMOS process. A value of 11.4 nV/√Hz at 100 Hz input referred noise voltage has been measured for a maximum power dissipation of 210 μW. Pyroelectric polyvinylidene fluoride (PVDF) thin films have been coated on 256-element focal plane arrays including the low-noise CSA as readout device. Experimental values of voltage responsivities of 3510 V/W on average at 10 Hz modulation frequency have been achieved for a sensing area of 105×105 μm.