Thinfilm technologies to fabricate a linear microactuator

The design selected for the microactuator is a three phase variable reluctance (VR) stepping motor with teeth. The stator consists of a flux guide, three groups of poles with teeth, and meander type coils for exciting each group of poles. The system’s traveler is built up by a flux guide and teeth....

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 2001-06, Vol.91 (1), p.145-149
Main Authors: Föhse, M, Kohlmeier, T, Gatzen, H.H
Format: Article
Language:English
Subjects:
Applied sciences
Electroplating
Embedding
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Linear motor
Magnetic components, instruments and techniques
Mechanical engineering. Machine design
MEMS
Physics
Planarization
Precision engineering, watch making
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Summary:The design selected for the microactuator is a three phase variable reluctance (VR) stepping motor with teeth. The stator consists of a flux guide, three groups of poles with teeth, and meander type coils for exciting each group of poles. The system’s traveler is built up by a flux guide and teeth. For a good actuator’s performance the electroplated magnetic structures’ properties have to be optimized. To reach a small air gap that all VR-motors require, the microactuator’s surface needs a very low roughness. Therefore, to fabricate the microactuator in thinfilm technology the most important steps are electroplating the structures and embedding these structures for final planarization.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(01)00509-X