Recent achievements in miniaturised humidity sensors—a review of transduction techniques

A review of miniaturised humidity sensors is presented. Recent achievements in capacitive-, hygrometric-, gravimetric-, optical- and integrated sensors are discussed. Attention is paid to a general perspective of miniaturised humidity sensors, emphasising on integration issues and technological chal...

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Bibliographic Details
Published in:Sensors & Actuators: A. Physical 2002-02, Vol.96 (2), p.196-210
Main Author: Rittersma, Z.M.
Format: Article
Language:English
Subjects:
Humidity sensors
Hygrometers
Hygrometry
Transduction techniques
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Summary:A review of miniaturised humidity sensors is presented. Recent achievements in capacitive-, hygrometric-, gravimetric-, optical- and integrated sensors are discussed. Attention is paid to a general perspective of miniaturised humidity sensors, emphasising on integration issues and technological challenges. A table summarising most of the reviewed devices is included.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(01)00788-9