Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications

This work describes the design and characterization of a micromachined thermal conductivity sensor for detection of hydrogen in automotive fuel cell systems. Thermal and gas-sensing properties are investigated via simulations and experiments. The manufactured sensors consist of a thin dielectric mem...

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Bibliographic Details
Published in:Sensors and actuators. A, Physical Physical, 2002-04, Vol.97, p.104-108
Main Authors: Simon, Isolde, Arndt, Michael
Format: Article
Language:English
Subjects:
Automotive
Exact sciences and technology
Fast response
General equipment and techniques
Hydrogen
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Micro gas sensor
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Thermal conductivity
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Summary:This work describes the design and characterization of a micromachined thermal conductivity sensor for detection of hydrogen in automotive fuel cell systems. Thermal and gas-sensing properties are investigated via simulations and experiments. The manufactured sensors consist of a thin dielectric membrane as carrier structure for a platinum heater and temperature sensor. Membrane and heater size were varied to examine their influence on sensitivity, power consumption and thermal response. Based on a sensor element with a membrane size 1.5 mm×1.5 mm a hydrogen sensor prototype with a detection limit of 0.2% hydrogen in air was achieved.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(01)00825-1