Laser assisted surface nanopatterning

Pulsed laser irradiation combined with scanning probe microscopy (SPM) to achieve surface nanopatterning is investigated. A nanosecond pulsed laser beam is introduced to a gap between SPM tip and substrate surface. With the tip scanning over the surface, 10 nm resolution nanolines and nanocharacters...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2003-11, Vol.108 (1), p.69-74
Main Authors: Hong, M.H., Huang, S.M., Luk’yanchuk, B.S., Chong, T.C.
Format: Article
Language:English
Subjects:
Laser
Nanofabrication
Near-field optics
Scanning probe microscopy
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Summary:Pulsed laser irradiation combined with scanning probe microscopy (SPM) to achieve surface nanopatterning is investigated. A nanosecond pulsed laser beam is introduced to a gap between SPM tip and substrate surface. With the tip scanning over the surface, 10 nm resolution nanolines and nanocharacters can be obtained on metal and photoresist surfaces. With the fine-tuning of laser processing parameters, the depth and width of the nanolines can be controlled. Laser surface nanopatterning is also carried out by optical near-field effect with particles as lithography mask. Theory study shows that small particles work as efficient lenses. Light intensity under the particles is greatly enhanced dozens of times within a region
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(03)00364-9