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A study of Love-wave acoustic sensors
Love-mode acoustic devices are very promising as biosensors in gaseous and liquid environments because of their high sensitivity. An experimental studu of Love-wave devices based on SiO 2/ST-cut quartz, over a wide range of SiO 2 thickness, is presented in this paper. Devices with up to 7.3 μm thick...
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Published in: | Sensors and actuators. A. Physical. 1996-09, Vol.56 (3), p.211-219 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Love-mode acoustic devices are very promising as biosensors in gaseous and liquid environments because of their high sensitivity. An experimental studu of Love-wave devices based on SiO
2/ST-cut quartz, over a wide range of SiO
2 thickness, is presented in this paper. Devices with up to 7.3 μm thick SiO
2 guiding layers have been successully manufactured via an r.f. sputtering technique. Mass sensitivity, velocity, insertion loss, oscillation frequency stability and temperature coefficient of the frequency have been studied as a function of layer thickness. The sensitivity increases with increasing layer thickness and reaches a maximum at around 5.5 μm, for a wavelenght of 40 μm, in accordance with theory. Further increasing the thickness decreases the sensitivity dramatically. High sensitivity (≥ 300 cm
2 g
−1) can be achieved at thickness between 3.5 and 6.5 μm. The Low-wave dual-channel delay-line oscilltors also demonstrate high frequency stability and low noise levels. The frequencies of the two channels track each other extremely well. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/S0924-4247(96)01311-8 |